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Basic Principles of Confocal Microscopy

Source:Shenzhen Kai Mo Rui Electronic Technology Co. LTD2026-07-17

Confocal microscopy (also referred to as confocal imaging) follows a two-step optical workflow:

First, the light source pinhole forms an image at the focal point on the sample surface;

Second, this focal point is then imaged onto the detection pinhole.

The diagram below illustrates the optical principle of a confocal

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microscope:1 Light Source;2 Source Pinhole;3 Beam Splitter (Half-mirror);4 Chromatic Aberration Objective Lens;5 Specimen / Workpiece;6 Detection Pinhole;7 Photodetector;8 Vertical Displacement Stage;a Light beam focused on the workpiece;b Out-of-focus light beam。

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The two pinholes are conjugate pinholes, which constitutes the core confocal principle;

Light passes through the objective lens twice along opposite propagation directions;

All optical components adopt a coaxial layout.

The chromatic aberration objective lens moves vertically along the optical axis. The detected signal peaks when the light beam is precisely focused on the workpiece surface. Accordingly, the surface height of the specimen can be quantified by analyzing signal data from the photodetector.

Principle of Axial Chromatic Dispersion

Within a dispersive optical system, the positional relationship between a point light source and its corresponding image is wavelength-dependent. When illuminated by polychromatic white light, the dispersive optical system generates a series of continuous images corresponding to the spectral components of the incident beam.
Axial chromatic dispersion is an inherent physical property of all optical systems based on refraction, diffraction, and graded refractive index structures.

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Component Legend:1 Point Light Source,2 Dispersive Objective Lens;a Focal plane for the shortest wavelength,b Focal plane for the longest wavelength

;c Axial Chromatic Dispersion。

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Applications of Confocal Micro Measuring Instruments

A confocal micro measuring instrument consists of a lateral scanning subsystem and a signal detection subsystem. It adopts a non-contact detection scheme built upon confocal chromatic dispersion optics to calculate the height information of target surfaces.
Confocal microscopes are widely applied for profile metrology. Their vertical measurement range is generally limited to surface texture inspection on flat or mildly curved workpieces, with the measurable height difference typically less than several millimeters.



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